Tokyo Electron to supply ASML with equipment for next-generation EUV
2021-06-11 05:43:08

Recently, Tokyo Electron Ltd., a major Japanese semiconductor manufacturing equipment company, announced its plan to supply next-generation equipment to a laboratory jointly operated by fellow industry players ASML of the Netherlands and IMEC, a Belgian research institute.

Tokyo Electron will provide "coating and development equipment" for applying photoresist to semiconductor wafers to develop them.

This is the first time that Tokyo Electron has supplied equipment to these laboratories. The equipment will be combined with a new generation of EUV (Extreme Ultraviolet) lithography equipment produced by ASML. (Nikkei)

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