Asia Tech Wire (Sep 3) -- Samsung Electronics is testing Tokyo Electron Limited's (TEL) Acrevia gas cluster beam (GCB) system, according to The Elec.

TEL announced the Acrevia system in July, which can precisely shape EUV lithography patterns locally with gas cluster beams to repair pattern defects and reduce pattern roughness.

A TEL spokesperson confirmed that a customer is indeed testing the Acrevia system for use in foundry.

Samsung Electronics has previously tested Applied Materials' Centura Sculpta patterning system on the 4nm process, and is now testing the TEL system, aiming to strengthen the competition for pattern shaping orders between the two semiconductor equipment suppliers.